Micromachined magnetic actuators using electroplated permalloy

Chang Liu; Yong W. Yi

doi:10.1109/20.764895

Micromachined magnetic actuators using electroplated permalloy

Chang Liu^*, Yong W. Yi

^*Corresponding author for this work

Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

55 Scopus citations

Abstract

Results on design, fabrication, and testing of silicon niicrornachined magnetic actuators are presented. Electroplated, low-stress permalloy (NigoFe2o) material is the medium for magnetic interaction and force generation. The permalloy piece is supported by a structural plate, which consists of polycrystalline silicon thin film prepared by low-pressure chemical vapor deposition (LPCVD). Magnetic actuators supported both by cantilever beams and by torsional beams can provide large force (on the order of 100 jtN) and large displacement (on the order of 100 /jm). The vertical loading force of magnetic actuators under external bias have been experimentally determined. Applications of such actuators in magnetically assisted lévitation and parallel assembly of three-dimensional structures are demonstrated.

Original language	English (US)
Pages (from-to)	1976-1985
Number of pages	10
Journal	IEEE Transactions on Magnetics
Volume	35
Issue number	3 PART 2
DOIs	https://doi.org/10.1109/20.764895
State	Published - 1999

Keywords

Magnetic actuators
Permalloy

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Electrical and Electronic Engineering

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abstract = "Results on design, fabrication, and testing of silicon niicrornachined magnetic actuators are presented. Electroplated, low-stress permalloy (NigoFe2o) material is the medium for magnetic interaction and force generation. The permalloy piece is supported by a structural plate, which consists of polycrystalline silicon thin film prepared by low-pressure chemical vapor deposition (LPCVD). Magnetic actuators supported both by cantilever beams and by torsional beams can provide large force (on the order of 100 jtN) and large displacement (on the order of 100 /jm). The vertical loading force of magnetic actuators under external bias have been experimentally determined. Applications of such actuators in magnetically assisted l{\'e}vitation and parallel assembly of three-dimensional structures are demonstrated.",

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AU - Yi, Yong W.

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N2 - Results on design, fabrication, and testing of silicon niicrornachined magnetic actuators are presented. Electroplated, low-stress permalloy (NigoFe2o) material is the medium for magnetic interaction and force generation. The permalloy piece is supported by a structural plate, which consists of polycrystalline silicon thin film prepared by low-pressure chemical vapor deposition (LPCVD). Magnetic actuators supported both by cantilever beams and by torsional beams can provide large force (on the order of 100 jtN) and large displacement (on the order of 100 /jm). The vertical loading force of magnetic actuators under external bias have been experimentally determined. Applications of such actuators in magnetically assisted lévitation and parallel assembly of three-dimensional structures are demonstrated.

AB - Results on design, fabrication, and testing of silicon niicrornachined magnetic actuators are presented. Electroplated, low-stress permalloy (NigoFe2o) material is the medium for magnetic interaction and force generation. The permalloy piece is supported by a structural plate, which consists of polycrystalline silicon thin film prepared by low-pressure chemical vapor deposition (LPCVD). Magnetic actuators supported both by cantilever beams and by torsional beams can provide large force (on the order of 100 jtN) and large displacement (on the order of 100 /jm). The vertical loading force of magnetic actuators under external bias have been experimentally determined. Applications of such actuators in magnetically assisted lévitation and parallel assembly of three-dimensional structures are demonstrated.

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