Results on design, fabrication, and testing of silicon niicrornachined magnetic actuators are presented. Electroplated, low-stress permalloy (NigoFe2o) material is the medium for magnetic interaction and force generation. The permalloy piece is supported by a structural plate, which consists of polycrystalline silicon thin film prepared by low-pressure chemical vapor deposition (LPCVD). Magnetic actuators supported both by cantilever beams and by torsional beams can provide large force (on the order of 100 jtN) and large displacement (on the order of 100 /jm). The vertical loading force of magnetic actuators under external bias have been experimentally determined. Applications of such actuators in magnetically assisted lévitation and parallel assembly of three-dimensional structures are demonstrated.
- Magnetic actuators
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering