Micromachined magnetic actuators using electroplated permalloy

Chang Liu*, Yong W. Yi

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

58 Scopus citations


Results on design, fabrication, and testing of silicon niicrornachined magnetic actuators are presented. Electroplated, low-stress permalloy (NigoFe2o) material is the medium for magnetic interaction and force generation. The permalloy piece is supported by a structural plate, which consists of polycrystalline silicon thin film prepared by low-pressure chemical vapor deposition (LPCVD). Magnetic actuators supported both by cantilever beams and by torsional beams can provide large force (on the order of 100 jtN) and large displacement (on the order of 100 /jm). The vertical loading force of magnetic actuators under external bias have been experimentally determined. Applications of such actuators in magnetically assisted lévitation and parallel assembly of three-dimensional structures are demonstrated.

Original languageEnglish (US)
Pages (from-to)1976-1985
Number of pages10
JournalIEEE Transactions on Magnetics
Issue number3 PART 2
StatePublished - 1999


  • Magnetic actuators
  • Permalloy

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering


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