Micromachined permalloy magnetic actuator array for micro robotics assembly systems

Chang Liu; Thomas Tsao; Yu Chong Tai; Wenheng Liu; Peter Will; Chih Ming Ho

Micromachined permalloy magnetic actuator array for micro robotics assembly systems

Chang Liu^*, Thomas Tsao, Yu Chong Tai, Wenheng Liu, Peter Will, Chih Ming Ho

^*Corresponding author for this work

Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

71 Scopus citations

Abstract

Arrays of permalloy magnetic actuators have been studied for the use as precision micro robotics assembly systems. The actuator arrays have been tested for lifting and moving silicon and glass chips. The actuator unit consists of a permalloy plate 1 mm×1 mm×5 μm in size together with polysilicon bending supports. Experimentally, it can lift a 87 μN (or 8.88 mg) force under a magnetic field of approximately 2 × 10⁴ A/m. A proposed synchronous driving mode has been observed, and both translation and rotation of a silicon chip has been demonstrated.

Original language	English (US)
Title of host publication	International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings
Publisher	IEEE
Pages	328-331
Number of pages	4
Volume	1
State	Published - Dec 1 1995
Event	Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) - Stockholm, Sweden Duration: Jun 25 1995 → Jun 29 1995

Other

Other	Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2)
City	Stockholm, Sweden
Period	6/25/95 → 6/29/95

ASJC Scopus subject areas

Engineering(all)

Cite this

@inproceedings{49ca628d8e5a439a80eea00af03e16df,

title = "Micromachined permalloy magnetic actuator array for micro robotics assembly systems",

abstract = "Arrays of permalloy magnetic actuators have been studied for the use as precision micro robotics assembly systems. The actuator arrays have been tested for lifting and moving silicon and glass chips. The actuator unit consists of a permalloy plate 1 mm×1 mm×5 μm in size together with polysilicon bending supports. Experimentally, it can lift a 87 μN (or 8.88 mg) force under a magnetic field of approximately 2 × 104 A/m. A proposed synchronous driving mode has been observed, and both translation and rotation of a silicon chip has been demonstrated.",

author = "Chang Liu and Thomas Tsao and Tai, {Yu Chong} and Wenheng Liu and Peter Will and Ho, {Chih Ming}",

year = "1995",

month = dec,

day = "1",

language = "English (US)",

volume = "1",

pages = "328--331",

booktitle = "International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings",

publisher = "IEEE",

note = "Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) ; Conference date: 25-06-1995 Through 29-06-1995",

}

Liu, C, Tsao, T, Tai, YC, Liu, W, Will, P & Ho, CM 1995, Micromachined permalloy magnetic actuator array for micro robotics assembly systems. in International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings. vol. 1, IEEE, pp. 328-331, Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2), Stockholm, Sweden, 6/25/95.

TY - GEN

T1 - Micromachined permalloy magnetic actuator array for micro robotics assembly systems

AU - Liu, Chang

AU - Tsao, Thomas

AU - Tai, Yu Chong

AU - Liu, Wenheng

AU - Will, Peter

AU - Ho, Chih Ming

PY - 1995/12/1

Y1 - 1995/12/1

N2 - Arrays of permalloy magnetic actuators have been studied for the use as precision micro robotics assembly systems. The actuator arrays have been tested for lifting and moving silicon and glass chips. The actuator unit consists of a permalloy plate 1 mm×1 mm×5 μm in size together with polysilicon bending supports. Experimentally, it can lift a 87 μN (or 8.88 mg) force under a magnetic field of approximately 2 × 104 A/m. A proposed synchronous driving mode has been observed, and both translation and rotation of a silicon chip has been demonstrated.

AB - Arrays of permalloy magnetic actuators have been studied for the use as precision micro robotics assembly systems. The actuator arrays have been tested for lifting and moving silicon and glass chips. The actuator unit consists of a permalloy plate 1 mm×1 mm×5 μm in size together with polysilicon bending supports. Experimentally, it can lift a 87 μN (or 8.88 mg) force under a magnetic field of approximately 2 × 104 A/m. A proposed synchronous driving mode has been observed, and both translation and rotation of a silicon chip has been demonstrated.

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M3 - Conference contribution

AN - SCOPUS:0029489895

VL - 1

SP - 328

EP - 331

BT - International Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings

PB - IEEE

T2 - Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2)

Y2 - 25 June 1995 through 29 June 1995

ER -

Micromachined permalloy magnetic actuator array for micro robotics assembly systems

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