Micromachined permalloy magnetic actuator array for micro robotics assembly systems

Chang Liu*, Thomas Tsao, Yu Chong Tai, Wenheng Liu, Peter Will, Chih Ming Ho

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

66 Scopus citations

Abstract

Arrays of permalloy magnetic actuators have been studied for the use as precision micro robotics assembly systems. The actuator arrays have been tested for lifting and moving silicon and glass chips. The actuator unit consists of a permalloy plate 1 mm×1 mm×5 μm in size together with polysilicon bending supports. Experimentally, it can lift a 87 μN (or 8.88 mg) force under a magnetic field of approximately 2 × 104 A/m. A proposed synchronous driving mode has been observed, and both translation and rotation of a silicon chip has been demonstrated.

Original languageEnglish (US)
Title of host publicationInternational Conference on Solid-State Sensors and Actuators, and Eurosensors IX, Proceedings
PublisherIEEE
Pages328-331
Number of pages4
Volume1
StatePublished - Dec 1 1995
EventProceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) - Stockholm, Sweden
Duration: Jun 25 1995Jun 29 1995

Other

OtherProceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2)
CityStockholm, Sweden
Period6/25/956/29/95

ASJC Scopus subject areas

  • Engineering(all)

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