Micromachined surface acoustic wave sensor for detecting inert gases

INIS

• sound waves 100%
• surfaces 80%
• sensors 80%
• thin films 40%
• variations 40%
• transducers 40%
• electrical conductivity 40%
• films 20%
• detection 20%
• interactions 20%
• applications 20%
• substrates 20%
• gases 20%
• voltage 20%
• velocity 20%
• mhz range 20%
• fingers 20%
• oscillators 20%
• width 20%
• titanium 20%
• metastable states 20%

Physics

• Transducer 40%
• Thin Films 40%
• Frequency Shift 40%
• Detection 40%
• Frequencies 40%
• Variations 40%
• Oscillator 20%
• Electric Potential 20%
• Wave Velocity 20%
• Acoustic Wave 20%
• Rare Gas 20%
• Photolithography 20%
• Utilization 20%
• Substrates 20%
• Pressure 20%
• Width 20%
• Titanium 20%

Chemistry

• Surface Acoustic Wave 100%
• Sensor 80%
• Conductivity 40%
• Voltage 20%
• Noble Gas Atom 20%
• Liquid Film 20%
• Sound Property 20%
• Application 20%
• Pressure 20%
• Amount 20%