Micromachined thermal imaging mesh for conformal sensing system

Nannan Chen*, Jonathan Engel, Jack Chen, Zhifang Fan, Chang Liu

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations


In this paper we present the development of micromachined thermal imaging mesh for conformal sensing system. The imaging mesh consists of an m-by-n matrix of gold thermal resistor network. The sensing and processing scheme allows us to image the presence of a localized heat source over a broad piece of imaging mesh. At the same time, this approach dramatically reduces the number of sensors hence the wiring required to image a given area. The mesh is fabricated on a piece of freestanding flexible polyimide fabric. Serpentine structure is specially designed to improve the conformability of the fabric to 3D objects. Thermal imaging data are presented in this paper.

Original languageEnglish (US)
Title of host publicationProceedings of the Fourth IEEE Conference on Sensors 2005
Number of pages4
StatePublished - Dec 1 2005
EventFourth IEEE Conference on Sensors 2005 - Irvine, CA, United States
Duration: Oct 31 2005Nov 3 2005

Publication series

NameProceedings of IEEE Sensors


OtherFourth IEEE Conference on Sensors 2005
CountryUnited States
CityIrvine, CA

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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