Micromachining techniques for liquid crystal polymer

X. Wang*, L. H. Lu, C. Liu

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

27 Scopus citations

Abstract

This paper reports newly developed microfabrication techniques for liquid crystal polymer (LCP) for the first time. LCP is a thermal plastic polymer with regularly aligned molecule chains. It exhibits excellent electrical, physical, and chemical properties, which make it suitable for many MEMS applications. The chemical compatibility of LCP with commonly used chemicals is investigated in this work. MEMS fabrication processes such as metallization, plasma bulk etching, and low temperature thermal lamination have been developed. These micromachining techniques are successfully demonstrated by the development of a microfluid channel system composed of LCP/glass assembly.

Original languageEnglish (US)
Title of host publicationProceedings of the IEEE Micro Electro Mechanical Systems (MEMS)
Pages126-130
Number of pages5
StatePublished - Jan 1 2001
Event14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2001) - Interlaken, Switzerland
Duration: Jan 21 2001Jan 25 2001

Other

Other14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2001)
CountrySwitzerland
CityInterlaken
Period1/21/011/25/01

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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