Abstract
This paper reports newly developed microfabrication techniques for liquid crystal polymer (LCP) for the first time. LCP is a thermal plastic polymer with regularly aligned molecule chains. It exhibits excellent electrical, physical, and chemical properties, which make it suitable for many MEMS applications. The chemical compatibility of LCP with commonly used chemicals is investigated in this work. MEMS fabrication processes such as metallization, plasma bulk etching, and low temperature thermal lamination have been developed. These micromachining techniques are successfully demonstrated by the development of a microfluid channel system composed of LCP/glass assembly.
| Original language | English (US) |
|---|---|
| Title of host publication | Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS) |
| Pages | 126-130 |
| Number of pages | 5 |
| State | Published - Jan 1 2001 |
| Event | 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2001) - Interlaken, Switzerland Duration: Jan 21 2001 → Jan 25 2001 |
Other
| Other | 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2001) |
|---|---|
| Country/Territory | Switzerland |
| City | Interlaken |
| Period | 1/21/01 → 1/25/01 |
ASJC Scopus subject areas
- Control and Systems Engineering
- Mechanical Engineering
- Electrical and Electronic Engineering