Microplasma devices fabricated in silicon, ceramic, and metal/polymer structures: Arrays, emitters and photodetectors

J. G. Eden^*, S. J. Park, N. P. Ostrom, S. T. McCain, C. J. Wagner, B. A. Vojak, J. Chen, C. Liu, P. Von Allmen, F. Zenhausern, D. J. Sadler, C. Jensen, D. L. Wilcox, J. J. Ewing

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