Microstereolithography of lead zirconate titanate thick film on silicon substrate

X. N. Jiang*, C. Sun, X. Zhang, B. Xu, Y. H. Ye

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

39 Scopus citations


The microstereolithography (μSL) of lead zirconate titanate (PZT) thick films on platinum-buffered silicon substrates is reported for the first time in this paper. Crack-free PZT thick films (80-130 μm thick) have been fabricated by laser direct-write UV polymerization from the HDDA-based UV curable PZT suspensions. The characterization of the fired films shows dielectric permittivities of 120-200, tangent loss of 0.92-2.5% and remnant polarization of 0.9-1.7 μC/cm2. The field-induced longitudinal piezoelectric coefficient (d33) of an 84-μm thick film is 100 pC/N and the piezoelectric voltage coefficient (g33) is about 59.5 × 10-3 V m/N. These results demonstrated the potential for μSL of advanced piezoelectric microsensors and microactuators.

Original languageEnglish (US)
Pages (from-to)72-77
Number of pages6
JournalSensors and Actuators, A: Physical
Issue number1-2
StatePublished - Dec 1 2000

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering


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