Microstructure array on Si and SiOx generated by micro-contact printing, wet chemical etching and reactive ion etching

Hua Zhang*, Nabil A. Amro, Sandeep Disawal, Robert Elghanian, Roger Shile, Joseph Fragala

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

6 Scopus citations

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Material Science