Abstract
A miniature sputtering system equipped with mylar windows allowing for normal and grazing incidence x-ray studies to be performed in real time during film growth is described herein. The system incorporates multitarget sputtering guns which allow for the deposition of up to four different materials. In this way multilayer structures can be studied in situ without changing the substrate environment or alignment between layers.
Original language | English (US) |
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Pages (from-to) | 598-600 |
Number of pages | 3 |
Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
Volume | 12 |
Issue number | 2 |
DOIs | |
State | Published - Mar 1994 |
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films