Miniature multitarget sputtering system for the in situ x-ray study of high Tcmultilayer film growth

S. M. Williams, H. Q. Yang, John B Ketterson

Research output: Contribution to journalLetterpeer-review

1 Scopus citations

Abstract

A miniature sputtering system equipped with mylar windows allowing for normal and grazing incidence x-ray studies to be performed in real time during film growth is described herein. The system incorporates multitarget sputtering guns which allow for the deposition of up to four different materials. In this way multilayer structures can be studied in situ without changing the substrate environment or alignment between layers.

Original languageEnglish (US)
Pages (from-to)598-600
Number of pages3
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume12
Issue number2
DOIs
StatePublished - Jan 1 1994

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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