Miniature multitarget sputtering system for the in situ x-ray study of high Tcmultilayer film growth

S. M. Williams; H. Q. Yang; J. B. Ketterson

doi:10.1116/1.578841

Miniature multitarget sputtering system for the in situ x-ray study of high T_cmultilayer film growth

S. M. Williams, H. Q. Yang, J. B. Ketterson

MRC - Materials Research Center

Research output: Contribution to journal › Letter › peer-review

2 Scopus citations

Abstract

A miniature sputtering system equipped with mylar windows allowing for normal and grazing incidence x-ray studies to be performed in real time during film growth is described herein. The system incorporates multitarget sputtering guns which allow for the deposition of up to four different materials. In this way multilayer structures can be studied in situ without changing the substrate environment or alignment between layers.

Original language	English (US)
Pages (from-to)	598-600
Number of pages	3
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	12
Issue number	2
DOIs	https://doi.org/10.1116/1.578841
State	Published - Mar 1994

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

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title = "Miniature multitarget sputtering system for the in situ x-ray study of high Tcmultilayer film growth",

abstract = "A miniature sputtering system equipped with mylar windows allowing for normal and grazing incidence x-ray studies to be performed in real time during film growth is described herein. The system incorporates multitarget sputtering guns which allow for the deposition of up to four different materials. In this way multilayer structures can be studied in situ without changing the substrate environment or alignment between layers.",

author = "Williams, {S. M.} and Yang, {H. Q.} and Ketterson, {J. B.}",

year = "1994",

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AU - Yang, H. Q.

AU - Ketterson, J. B.

PY - 1994/3

Y1 - 1994/3

N2 - A miniature sputtering system equipped with mylar windows allowing for normal and grazing incidence x-ray studies to be performed in real time during film growth is described herein. The system incorporates multitarget sputtering guns which allow for the deposition of up to four different materials. In this way multilayer structures can be studied in situ without changing the substrate environment or alignment between layers.

AB - A miniature sputtering system equipped with mylar windows allowing for normal and grazing incidence x-ray studies to be performed in real time during film growth is described herein. The system incorporates multitarget sputtering guns which allow for the deposition of up to four different materials. In this way multilayer structures can be studied in situ without changing the substrate environment or alignment between layers.

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Miniature multitarget sputtering system for the in situ x-ray study of high T_cmultilayer film growth

Abstract

ASJC Scopus subject areas

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