Abstract
X-ray microanalysis has been performed using a STEM at 100 keV allowing an incident electron probe size as small as 1 nanometer. With the experimental conditions, the spatial resolution of this technique is estimated to be about 3 nanometers. Good correlations between these two techniques are obtained on LP-MOCVD quantum wells (InP/GaInAs/InP), and the non-equivalence of the two heterojunctions is evidenced.
Translated title of the contribution | MOCVD Growth and Characterization of InP/GaInAs/InP Quantum Wells. |
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Original language | French |
Pages (from-to) | 197-198 |
Number of pages | 2 |
Journal | Le Vide, les couches minces |
Volume | 43 |
Issue number | 241 |
State | Published - Mar 1 1988 |
ASJC Scopus subject areas
- General Engineering