X-ray microanalysis has been performed using a STEM at 100 keV allowing an incident electron probe size as small as 1 nanometer. With the experimental conditions, the spatial resolution of this technique is estimated to be about 3 nanometers. Good correlations between these two techniques are obtained on LP-MOCVD quantum wells (InP/GaInAs/InP), and the non-equivalence of the two heterojunctions is evidenced.
|Translated title of the contribution||MOCVD Growth and Characterization of InP/GaInAs/InP Quantum Wells.|
|Number of pages||2|
|Journal||Le Vide, les couches minces|
|State||Published - Mar 1 1988|
ASJC Scopus subject areas