MOCVD of epitaxial BaTiO3 films using a liquid barium precursor

Andrew R. Teren, John A. Belot, Nikki L. Edleman, Tobin Jay Marks, Bruce W Wessels*

*Corresponding author for this work

Research output: Contribution to journalArticle

27 Scopus citations
Original languageEnglish (US)
Pages (from-to)175-177
Number of pages3
JournalChemical Vapor Deposition
Volume6
Issue number4
DOIs
StatePublished - Jan 1 2000

ASJC Scopus subject areas

  • Chemistry(all)
  • Surfaces and Interfaces
  • Process Chemistry and Technology

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