MOCVD precursor design issues. Recent advances in the chemistry and vapor pressure characteristics of Ba(hexafluoroacetylacetonate)2·polyether complexes

T. J. Marks; J. A. Belot; C. J. Reedy; R. J. McNeely; D. B. Studebaker; D. A. Neumayer; C. L. Stern

doi:10.1016/S0925-8388(96)02680-1

MOCVD precursor design issues. Recent advances in the chemistry and vapor pressure characteristics of Ba(hexafluoroacetylacetonate)₂·polyether complexes

T. J. Marks^*, J. A. Belot, C. J. Reedy, R. J. McNeely, D. B. Studebaker, D. A. Neumayer, C. L. Stern

^*Corresponding author for this work

Chemistry

Research output: Contribution to journal › Article › peer-review

15 Scopus citations

Abstract

This contribution presents synthetic, structural and volatility results for a series of new Ba(hfa)₂·polyether (hfa= 1,1,1,5,5,5-hexafluoropentane-2,4-dionate) MOCVD precursors. The major emphasis of this study is on the synthesis and characterization of new Ba(hexafluoroacetylacetonate)₂·polyether complexes as on well as elucidating relationships between volatility, melting point and molecular architecture using a variety of techniques, including reduced pressure thermogravimetric analysis (TGA). The results provide insights into tuning Ba precursor volatility characteristics based on straightforward modifications of the polyether structure.

Original language	English (US)
Pages (from-to)	243-248
Number of pages	6
Journal	Journal of Alloys and Compounds
Volume	251
Issue number	1-2
DOIs	https://doi.org/10.1016/S0925-8388(96)02680-1
State	Published - Apr 1997

Keywords

MOCVD
TGA

ASJC Scopus subject areas

Mechanics of Materials
Mechanical Engineering
Metals and Alloys
Materials Chemistry

Access to Document

10.1016/S0925-8388(96)02680-1

Cite this

@article{8ff9cc7f7a3e49fd9a86346f66746e8f,

title = "MOCVD precursor design issues. Recent advances in the chemistry and vapor pressure characteristics of Ba(hexafluoroacetylacetonate)2·polyether complexes",

abstract = "This contribution presents synthetic, structural and volatility results for a series of new Ba(hfa)2·polyether (hfa= 1,1,1,5,5,5-hexafluoropentane-2,4-dionate) MOCVD precursors. The major emphasis of this study is on the synthesis and characterization of new Ba(hexafluoroacetylacetonate)2·polyether complexes as on well as elucidating relationships between volatility, melting point and molecular architecture using a variety of techniques, including reduced pressure thermogravimetric analysis (TGA). The results provide insights into tuning Ba precursor volatility characteristics based on straightforward modifications of the polyether structure.",

keywords = "MOCVD, TGA",

author = "Marks, {T. J.} and Belot, {J. A.} and Reedy, {C. J.} and McNeely, {R. J.} and Studebaker, {D. B.} and Neumayer, {D. A.} and Stern, {C. L.}",

note = "Funding Information: This research was supported by the NSF through the Science and Technology Center tbr Superconductivity (Grant No. DMRo912~) and by NSF/ONR/ARPA (CHE°942 !910/N 00014o95o I o0717). Copyright: Copyright 2018 Elsevier B.V., All rights reserved.",

year = "1997",

month = apr,

doi = "10.1016/S0925-8388(96)02680-1",

language = "English (US)",

volume = "251",

pages = "243--248",

journal = "Journal of Alloys and Compounds",

issn = "0925-8388",

publisher = "Elsevier BV",

number = "1-2",

}

TY - JOUR

T1 - MOCVD precursor design issues. Recent advances in the chemistry and vapor pressure characteristics of Ba(hexafluoroacetylacetonate)2·polyether complexes

AU - Marks, T. J.

AU - Belot, J. A.

AU - Reedy, C. J.

AU - McNeely, R. J.

AU - Studebaker, D. B.

AU - Neumayer, D. A.

AU - Stern, C. L.

N1 - Funding Information: This research was supported by the NSF through the Science and Technology Center tbr Superconductivity (Grant No. DMRo912~) and by NSF/ONR/ARPA (CHE°942 !910/N 00014o95o I o0717). Copyright: Copyright 2018 Elsevier B.V., All rights reserved.

PY - 1997/4

Y1 - 1997/4

N2 - This contribution presents synthetic, structural and volatility results for a series of new Ba(hfa)2·polyether (hfa= 1,1,1,5,5,5-hexafluoropentane-2,4-dionate) MOCVD precursors. The major emphasis of this study is on the synthesis and characterization of new Ba(hexafluoroacetylacetonate)2·polyether complexes as on well as elucidating relationships between volatility, melting point and molecular architecture using a variety of techniques, including reduced pressure thermogravimetric analysis (TGA). The results provide insights into tuning Ba precursor volatility characteristics based on straightforward modifications of the polyether structure.

AB - This contribution presents synthetic, structural and volatility results for a series of new Ba(hfa)2·polyether (hfa= 1,1,1,5,5,5-hexafluoropentane-2,4-dionate) MOCVD precursors. The major emphasis of this study is on the synthesis and characterization of new Ba(hexafluoroacetylacetonate)2·polyether complexes as on well as elucidating relationships between volatility, melting point and molecular architecture using a variety of techniques, including reduced pressure thermogravimetric analysis (TGA). The results provide insights into tuning Ba precursor volatility characteristics based on straightforward modifications of the polyether structure.

KW - MOCVD

KW - TGA

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DO - 10.1016/S0925-8388(96)02680-1

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VL - 251

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EP - 248

JO - Journal of Alloys and Compounds

JF - Journal of Alloys and Compounds

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