Modeling and acoustic microscopy measurements for evaluation of the adhesion between a film and a substrate

Zhiqi Guo*, J. D. Achenbach, Anita Madan, Keith Martin, M. E. Graham

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

20 Scopus citations


A model for calculating the V(z) curve by line-focus acoustic microscopy contains the reflectance function of the specimen as a principal component. In this paper, the reflectance function has been analyzed for various film/substrate systems with a non-perfect interface between the film and the substrate. A theoretical study has been carried out to investigate the effect of a non-perfect interface on the propagation of surface acoustic waves (SAW) and its implications for measurements by line-focus acoustic microscopy (LFAM). An experimental study has been performed to verify the theoretical predictions, and to explore the potential of LFAM at high frequencies for non-destructive quantitative evaluation of the bond quality between a film and a substrate. A number of film specimens with different interface conditions between the film and the substrate have been investigated. The stiffness parameters of a non-perfect interface have been determined by the combined use of the V(z) model and LFAM based measur ements. The results have been compared with results obtained by other techniques.

Original languageEnglish (US)
Pages (from-to)188-200
Number of pages13
JournalThin Solid Films
Issue number1-2
StatePublished - Aug 15 2001


  • Adheres
  • Coatings
  • Elastic properties
  • Multilayers

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Materials Chemistry


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