Modelling and simulation of the micro milling process

M. S. Hong*, H. S. Jung, Kornel Ehmann, H. S. Yoon

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Currently, in order to increase its applicability, a micro system has been expanded to various areas such as micro fluidics. Among them a micro pump is required to deliver the fluid without overflow, which can be possible only with consistent surface of the micro channels. In general, the applications of the etching process in MEMS are restricted to the silicon-based materials and it is very difficult to obtain the required surface roughness. Micro machining, however, makes it possible to produce the various surface roughness with controls of spindle, feed rate, and depth of cut, etc. In this paper, the characteristics of the micro milling process has been modelled and simulated to generate the micro channels with different materials such as aluminium and copper, etc. The experimental results are compared with those of the computer simulation. The result shows that the micro milling process has different machining aspects comparing with the conventional milling process.

Original languageEnglish (US)
Title of host publicationLaser Metrology and Machine Performance VIII - 8th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2007
Publishereuspen
Pages299-308
Number of pages10
ISBN (Electronic)9780955308239
StatePublished - Jan 1 2007
Event8th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2007 - Cranfield, United Kingdom
Duration: Jun 25 2007Jun 28 2007

Publication series

NameLaser Metrology and Machine Performance VIII - 8th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2007

Other

Other8th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2007
CountryUnited Kingdom
CityCranfield
Period6/25/076/28/07

ASJC Scopus subject areas

  • Engineering(all)
  • Atomic and Molecular Physics, and Optics

Fingerprint Dive into the research topics of 'Modelling and simulation of the micro milling process'. Together they form a unique fingerprint.

  • Cite this

    Hong, M. S., Jung, H. S., Ehmann, K., & Yoon, H. S. (2007). Modelling and simulation of the micro milling process. In Laser Metrology and Machine Performance VIII - 8th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2007 (pp. 299-308). (Laser Metrology and Machine Performance VIII - 8th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2007). euspen.