TY - GEN
T1 - Modelling and simulation of the micro milling process
AU - Hong, M. S.
AU - Jung, H. S.
AU - Ehmann, Kornel
AU - Yoon, H. S.
PY - 2007/1/1
Y1 - 2007/1/1
N2 - Currently, in order to increase its applicability, a micro system has been expanded to various areas such as micro fluidics. Among them a micro pump is required to deliver the fluid without overflow, which can be possible only with consistent surface of the micro channels. In general, the applications of the etching process in MEMS are restricted to the silicon-based materials and it is very difficult to obtain the required surface roughness. Micro machining, however, makes it possible to produce the various surface roughness with controls of spindle, feed rate, and depth of cut, etc. In this paper, the characteristics of the micro milling process has been modelled and simulated to generate the micro channels with different materials such as aluminium and copper, etc. The experimental results are compared with those of the computer simulation. The result shows that the micro milling process has different machining aspects comparing with the conventional milling process.
AB - Currently, in order to increase its applicability, a micro system has been expanded to various areas such as micro fluidics. Among them a micro pump is required to deliver the fluid without overflow, which can be possible only with consistent surface of the micro channels. In general, the applications of the etching process in MEMS are restricted to the silicon-based materials and it is very difficult to obtain the required surface roughness. Micro machining, however, makes it possible to produce the various surface roughness with controls of spindle, feed rate, and depth of cut, etc. In this paper, the characteristics of the micro milling process has been modelled and simulated to generate the micro channels with different materials such as aluminium and copper, etc. The experimental results are compared with those of the computer simulation. The result shows that the micro milling process has different machining aspects comparing with the conventional milling process.
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M3 - Conference contribution
AN - SCOPUS:84908876851
T3 - Laser Metrology and Machine Performance VIII - 8th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2007
SP - 299
EP - 308
BT - Laser Metrology and Machine Performance VIII - 8th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2007
PB - euspen
T2 - 8th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2007
Y2 - 25 June 2007 through 28 June 2007
ER -