Modification of thin film growth using glancing-angle ions

Engineering & Materials Science

• Film growth 100%
• Thin films 59%
• Ions 58%
• Adatoms 15%
• Epitaxial growth 11%
• Sputtering 10%
• Nucleation 8%
• Textures 6%
• Defects 5%

Physics & Astronomy

• thin films 32%
• ions 29%
• flat surfaces 16%
• damage 12%
• ion currents 9%
• adatoms 9%
• selectivity 8%
• implantation 8%
• textures 7%
• incidence 7%
• sputtering 7%
• nucleation 6%
• energy 5%
• defects 5%

Chemical Compounds

• Modification 35%
• Ion 24%
• Surface 20%
• Diffusion 11%
• Epitaxial Growth 10%
• Adatoms 10%
• Sputtering 9%
• Crystalline Texture 8%
• Energy 8%
• Polycrystalline Solid 8%
• Nucleation 7%