Molecular dynamics simulation of residual stress in thin films grown by ion-beam deposition process

Sulin Zhang, Harley Johnson, Greg Wagner, Wing-Kam Liu, K. J. Hsia

Research output: Contribution to journal › Article › peer-review

Cite this

@article{8089a96e718b45b78bcc5ee579ab6eeb,

title = "Molecular dynamics simulation of residual stress in thin films grown by ion-beam deposition process",

author = "Sulin Zhang and Harley Johnson and Greg Wagner and Wing-Kam Liu and Hsia, {K. J.}",

year = "2003",

language = "English",

volume = "51",

pages = "5211--5222",

journal = "Acta Materialia",

issn = "1359-6454",

publisher = "Acta Materialia Inc",

}