MOSFET-embedded microcantilevers for measuring deflection in biomolecular sensors

Gajendra Shekhawat*, Soo Hyun Tark, Vinayak P. Dravid

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

249 Scopus citations


A promising approach for detecting biomolecules follows their binding to immobilized probe molecules on microfabricated cantilevers; binding causes surface stresses that bend the cantilever. We measured this deflection, which is on the order of tens of nanometers, by embedding a metal-oxide semiconductor field-effect transistor (MOSFET) into the base of the cantilever and recording decreases in drain current with deflections as small as 5 nanometers. The gate region of the MOSFET responds to surface stresses and thus is embedded in silicon nitride so as to avoid direct contact with the sample solution. This approach, which offers low noise, high sensitivity, and direct readout, was used to detect specific binding events with biotin and antibodies.

Original languageEnglish (US)
Pages (from-to)1592-1595
Number of pages4
Issue number5767
StatePublished - Mar 17 2006

ASJC Scopus subject areas

  • General

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