Multi-walled carbon nanotube filled conductive elastomers: Materials and application to micro transducers

Jonathan Engel*, Jack Chen, Nannan Chen, Saunvit Pandya, Chang Liu

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

52 Scopus citations

Abstract

We report a detailed study investigating the use of multi-walled carbon nanotube (MWNT) filled elastomers to enable sensitive and yet robust MEMS devices. This work is contrasted with previous work using carbon black filling, showing an 8-fold improvement in performance through the use of MWNT. The percolation behavior of MWNT in polydimethylsiloxane (PDMS) and polyurethane (PU) elastomers is presented. We have also developed and characterized two devices: (1) MWNT-based force sensitive resistors (FSRs), analogous to polymer piezoresistors; (2) robust collapsible capacitive tactile sensors using soft conductive elastomers.

Original languageEnglish (US)
Title of host publication19th IEEE International Conference on Micro Electro Mechanical Systems
Pages246-249
Number of pages4
StatePublished - Oct 24 2006
Event19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey
Duration: Jan 22 2006Jan 26 2006

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume2006
ISSN (Print)1084-6999

Other

Other19th IEEE International Conference on Micro Electro Mechanical Systems
CountryTurkey
CityIstanbul
Period1/22/061/26/06

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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