TY - GEN
T1 - Multi-walled carbon nanotube filled conductive elastomers
T2 - 19th IEEE International Conference on Micro Electro Mechanical Systems
AU - Engel, Jonathan
AU - Chen, Jack
AU - Chen, Nannan
AU - Pandya, Saunvit
AU - Liu, Chang
PY - 2006/10/24
Y1 - 2006/10/24
N2 - We report a detailed study investigating the use of multi-walled carbon nanotube (MWNT) filled elastomers to enable sensitive and yet robust MEMS devices. This work is contrasted with previous work using carbon black filling, showing an 8-fold improvement in performance through the use of MWNT. The percolation behavior of MWNT in polydimethylsiloxane (PDMS) and polyurethane (PU) elastomers is presented. We have also developed and characterized two devices: (1) MWNT-based force sensitive resistors (FSRs), analogous to polymer piezoresistors; (2) robust collapsible capacitive tactile sensors using soft conductive elastomers.
AB - We report a detailed study investigating the use of multi-walled carbon nanotube (MWNT) filled elastomers to enable sensitive and yet robust MEMS devices. This work is contrasted with previous work using carbon black filling, showing an 8-fold improvement in performance through the use of MWNT. The percolation behavior of MWNT in polydimethylsiloxane (PDMS) and polyurethane (PU) elastomers is presented. We have also developed and characterized two devices: (1) MWNT-based force sensitive resistors (FSRs), analogous to polymer piezoresistors; (2) robust collapsible capacitive tactile sensors using soft conductive elastomers.
UR - http://www.scopus.com/inward/record.url?scp=33750104490&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=33750104490&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:33750104490
SN - 0780394755
SN - 9780780394759
T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
SP - 246
EP - 249
BT - 19th IEEE International Conference on Micro Electro Mechanical Systems
Y2 - 22 January 2006 through 26 January 2006
ER -