MULTIPURPOSE PLASMA REACTOR FOR MATERIALS RESEARCH AND PROCESSING.

R. P H Chang*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

16 Scopus citations

Abstract

The operation of the Bell Laboratories large capacity, multipurpose plasma reactor for materials research and processing is discussed. The design of the reactor is such that all the plasma parameters can be independently controlled. This device has been used for growing, deposition, etching, as well as charged-particle-beammilling of thin films.

Original languageEnglish (US)
Pages (from-to)278-280
Number of pages3
JournalJ VAC SCI TECHNOL
Volume14
Issue number1
StatePublished - Jan 1 1976

ASJC Scopus subject areas

  • Engineering(all)

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