Multiscale modeling of thin-film deposition: Applications to si device processing

F. H. Baumann, D. L. Chopp, T. Díaz De La Rubia, G. H. Gilmer, J. E. Greene, H. Huang, S. Kodambaka, P. O’Sullivan, I. Petrov

Research output: Contribution to journalArticlepeer-review

77 Scopus citations
Original languageEnglish (US)
Pages (from-to)182-189
Number of pages8
JournalMRS Bulletin
Issue number3
StatePublished - Mar 2001

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Physical and Theoretical Chemistry

Cite this