@article{ee2ea6fe2ffa47779e4c6c7ee6a46c25,
title = "Multiscale modeling of thin-film deposition: Applications to si device processing",
author = "Baumann, {F. H.} and Chopp, {D. L.} and {D{\'i}az De La Rubia}, T. and Gilmer, {G. H.} and Greene, {J. E.} and H. Huang and S. Kodambaka and P. O{\textquoteright}Sullivan and I. Petrov",
year = "2001",
month = mar,
doi = "10.1557/mrs2001.40",
language = "English (US)",
volume = "26",
pages = "182--189",
journal = "MRS Bulletin",
issn = "0883-7694",
publisher = "Materials Research Society",
number = "3",
}