Multistage thermoelectric micro coolers

Ronggui Yang*, Gang Chen, G. Jeffrey Snyder, Jean Pierre Fleurial

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations


Multistage thermoelectric coolers have been used for a long time because they offer a larger temperature difference than single stage thermoelectric coolers. MEMS technology leads to the possibility to fabricate multistage thermoelectric micro coolers in batches without much increase in complexity compared to single stage cooler fabrication. In this paper, we discuss the design of multistage thermoelectric coolers to optimize the maximum temperature difference, which is of particular interest for micro coolers. As an example, a two-stage thermoelectric micro cooler is designed for the thermal management of a 10mW mid-IR laser. The heat leakage issue, the most important degradation mechanism for the performance of thermoelectric micro coolers, is also discussed and possible solutions are also presented.

Original languageEnglish (US)
Title of host publicationThermomechanical Phenomena in Electronic Systems -Proceedings of the Intersociety Conference
EditorsC.H. Amon, K. Ramakrishna, B.G. Sammakia, G. Subbarayan, S.B. Sathe, Y.K. Joshi
Number of pages7
StatePublished - Jan 1 2002
Event8th Intersociety Conference on Thermal and Thermommechanical phenomena in Electronic Systems - San Diego, CA, United States
Duration: May 30 2002Jun 1 2002


Other8th Intersociety Conference on Thermal and Thermommechanical phenomena in Electronic Systems
Country/TerritoryUnited States
CitySan Diego, CA


  • MEMS
  • Micro Cooler
  • Mid-IR Laser
  • Multistage
  • Thermal Management
  • Thermoelectrics

ASJC Scopus subject areas

  • General Engineering


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