TY - GEN
T1 - Nanocomposite conductive elastomer
T2 - 2006 MRS Fall Meeting
AU - Liu, Chang
PY - 2006
Y1 - 2006
N2 - 3D micro-molded PDMS (polydimethylsiloxane) elastomer is widely used in MEMS. However, traditional PDMS is non-conductive and as a result is used in mostly structural applications. It is difficult to embed elastomeric, "stretchy" conductors and transduction elements in molded PDMS matrix. We report general methods for monolithic fabrication of multi-layer PDMS structures with embedded conductive and non-conductive elastomer elements. Conductive PDMS parts, made of carbon-nanotube-filled composite PDMS, can form internal elastomer wires, electrodes, heaters, and sensors. The process uses a series of PDMS patterning, micromolding, and bonding techniques. In this work we demonstrate elastomer strain gauges, capacitive pressure sensors, as well as microfluidic channels with integrated heaters and sensors.
AB - 3D micro-molded PDMS (polydimethylsiloxane) elastomer is widely used in MEMS. However, traditional PDMS is non-conductive and as a result is used in mostly structural applications. It is difficult to embed elastomeric, "stretchy" conductors and transduction elements in molded PDMS matrix. We report general methods for monolithic fabrication of multi-layer PDMS structures with embedded conductive and non-conductive elastomer elements. Conductive PDMS parts, made of carbon-nanotube-filled composite PDMS, can form internal elastomer wires, electrodes, heaters, and sensors. The process uses a series of PDMS patterning, micromolding, and bonding techniques. In this work we demonstrate elastomer strain gauges, capacitive pressure sensors, as well as microfluidic channels with integrated heaters and sensors.
UR - http://www.scopus.com/inward/record.url?scp=40949123453&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=40949123453&partnerID=8YFLogxK
U2 - 10.1557/proc-0947-a07-01
DO - 10.1557/proc-0947-a07-01
M3 - Conference contribution
AN - SCOPUS:40949123453
SN - 9781604234039
T3 - Materials Research Society Symposium Proceedings
SP - 72
EP - 77
BT - Responsive Soft Matter
PB - Materials Research Society
Y2 - 27 November 2006 through 1 December 2006
ER -