Nanocomposite conductive elastomer: Microfabrication processes and applications in soft-matter MEMS sensors

Chang Liu*

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

3 Scopus citations

Abstract

3D micro-molded PDMS (polydimethylsiloxane) elastomer is widely used in MEMS. However, traditional PDMS is non-conductive and as a result is used in mostly structural applications. It is difficult to embed elastomeric, "stretchy" conductors and transduction elements in molded PDMS matrix. We report general methods for monolithic fabrication of multi-layer PDMS structures with embedded conductive and non-conductive elastomer elements. Conductive PDMS parts, made of carbon-nanotube-filled composite PDMS, can form internal elastomer wires, electrodes, heaters, and sensors. The process uses a series of PDMS patterning, micromolding, and bonding techniques. In this work we demonstrate elastomer strain gauges, capacitive pressure sensors, as well as microfluidic channels with integrated heaters and sensors.

Original languageEnglish (US)
Title of host publicationResponsive Soft Matter
Subtitle of host publicationChemistry and Physics for Assemblages, Films and Forms
PublisherMaterials Research Society
Pages72-77
Number of pages6
ISBN (Print)9781604234039
DOIs
StatePublished - Jan 1 2006
Event2006 MRS Fall Meeting - Boston, MA, United States
Duration: Nov 27 2006Dec 1 2006

Publication series

NameMaterials Research Society Symposium Proceedings
Volume947
ISSN (Print)0272-9172

Other

Other2006 MRS Fall Meeting
CountryUnited States
CityBoston, MA
Period11/27/0612/1/06

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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