Nanoelectromechanical Systems (NEMS) - Experiments and Modeling

Research output: Chapter in Book/Report/Conference proceedingChapter

Original languageEnglish
Title of host publicationApplied Scanning Probe Methods
EditorsB. Bhushan, H. Fuchs, S. Kawata
Place of PublicationHeidelberg, Germany
PublisherSpringer-Verlag
Volume5-7
StatePublished - 2006

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