Nanofabrication of plasmonic structures

Joel Henzie*, Jeunghoon Lee, Min Hyung Lee, Warefta Hasan, Teri W. Odom

*Corresponding author for this work

Research output: Contribution to journalReview articlepeer-review

237 Scopus citations


This review focuses on nanofabrication tools, based on soft lithography, which can generate a wide range of noble-metal structures with exceptional optical properties. These techniques offer a scalable and practical approach for producing arrays of complementary plasmonic structures (nanoholes and nanoparticles) and, in addition, expand the possible architectures of plasmonic materials because the metal building blocks can be organized over multiple length scales. We describe the preparation and characterization of five different systems: subwavelength nanohole arrays, finite arrays of nanoholes, microscale arrays of nanoholes, multiscale arrays of nanoparticles, and pyramidal particles. We also discuss how the surface plasmon resonances of these structures can be tuned across visible and near-infrared wavelengths by varying different parameters. Applications and future prospects of these nanostructured metals are addressed.

Original languageEnglish (US)
Pages (from-to)147-165
Number of pages19
JournalAnnual Review of Physical Chemistry
StatePublished - May 2009


  • Multiscale patterning
  • Nanohole arrays
  • Pyramidal nanoparticles
  • Refractive-index sensing
  • Surface plasmons

ASJC Scopus subject areas

  • Physical and Theoretical Chemistry


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