NANOLITHOGRAPHY METHODS AND PRODUCTS THEREFOR AND PRODUCED THEREBY

Research output: Patent

Cite this

@misc{8bc84d1753484027baef48a21157a478,

title = "NANOLITHOGRAPHY METHODS AND PRODUCTS THEREFOR AND PRODUCED THEREBY",

author = "Mirkin, {Chad A}",

note = "filingdate: 2004-2-2 issueddate: 2011-2-15 Status: published attorneydocketnumber: 1969-025-03; 7887885",

year = "2011",

month = feb,

day = "15",

language = "English",

type = "Patent",

}