NANOLITHOGRAPHY METHODS AND PRODUCTS THEREFOR AND PRODUCED THEREBY

Research output: Patent

Cite this

@misc{bbd462793ff7408ba422736b8c0aa338,

title = "NANOLITHOGRAPHY METHODS AND PRODUCTS THEREFOR AND PRODUCED THEREBY",

author = "Mirkin, \{Chad A\} and Vinayak Dravid",

note = "filingdate: 2007-10-31 issueddate: 2010-6-29 Status: published attorneydocketnumber: 2001-009-02; 7744963",

year = "2010",

month = jun,

day = "29",

language = "English",

type = "Patent",

}