Nanolithography using molecular optics

Robert J. Gordon*, Langchi Zhu, W. Andreas Schroeder, Tamar Seideman

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

34 Scopus citations

Abstract

The possibility of using an intense laser beam to focus a molecular beam onto a surface to create nanowires was explored. The effects of spherical and chromatic aberration and laser mode structure on the focusing properties of the molecular lens were examined. It was shown that with a grazing angle of incidence between the laser and molecular beams, it is possible to use available technology to create wires <50nm wide and >100μm long with a 100 W continuous wave laser.

Original languageEnglish (US)
Pages (from-to)669-676
Number of pages8
JournalJournal of Applied Physics
Volume94
Issue number1
DOIs
StatePublished - Jul 1 2003

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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