Nanomechanical property evaluation of tungsten thin film via frequency-domain photoacoustic microscopy

Ziwei Wang; Oluwaseyi Balogun; Yun Young Kim

doi:10.1016/j.tsf.2021.139050

Nanomechanical property evaluation of tungsten thin film via frequency-domain photoacoustic microscopy

Ziwei Wang, Oluwaseyi Balogun, Yun Young Kim^*

^*Corresponding author for this work

Mechanical Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

This study investigates the reduction in nanomechanical properties of a tungsten (W) thin film measured using a laser ultrasonic technique. A 96 nm thick W film was prepared via direct-current magnetron sputtering and inspected using scanning electron microscopy with energy dispersive X-ray spectroscopy, X-ray diffraction, and X-ray reflectivity techniques. Moreover, frequency-domain photoacoustic microscopy was employed to evaluate the Young's modulus (E_W) of W. The velocity dispersion of a surface acoustic wave excited by an intensity-modulated laser was measured and curve-fitted using a computational finite element model to estimate E_W. In addition, a high-frequency microcantilever resonance test was performed to verify the results. The results show that E_W of the film is 45.3% lower than that of the macroscopic property because of the predominant β-W phase. The Young's moduli obtained from the two different techniques agree well with each other, with a relative error of 13.3%. The hardness-to-E_W ratio obtained using a nanoindenter was calculated to be 0.025±0.004.

Original language	English (US)
Article number	139050
Journal	Thin Solid Films
Volume	742
DOIs	https://doi.org/10.1016/j.tsf.2021.139050
State	Published - Jan 31 2022

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Surfaces and Interfaces
Surfaces, Coatings and Films
Metals and Alloys
Materials Chemistry

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10.1016/j.tsf.2021.139050

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title = "Nanomechanical property evaluation of tungsten thin film via frequency-domain photoacoustic microscopy",

abstract = "This study investigates the reduction in nanomechanical properties of a tungsten (W) thin film measured using a laser ultrasonic technique. A 96 nm thick W film was prepared via direct-current magnetron sputtering and inspected using scanning electron microscopy with energy dispersive X-ray spectroscopy, X-ray diffraction, and X-ray reflectivity techniques. Moreover, frequency-domain photoacoustic microscopy was employed to evaluate the Young's modulus (EW) of W. The velocity dispersion of a surface acoustic wave excited by an intensity-modulated laser was measured and curve-fitted using a computational finite element model to estimate EW. In addition, a high-frequency microcantilever resonance test was performed to verify the results. The results show that EW of the film is 45.3% lower than that of the macroscopic property because of the predominant β-W phase. The Young's moduli obtained from the two different techniques agree well with each other, with a relative error of 13.3%. The hardness-to-EW ratio obtained using a nanoindenter was calculated to be 0.025±0.004.",

author = "Ziwei Wang and Oluwaseyi Balogun and Kim, {Yun Young}",

note = "Funding Information: This work was supported by the research fund of Chungnam National University. The W sample was prepared in the UNIST Central Research Facilities. The SEM-EDX analysis was conducted in the Electro Ceramics Center, Dong-eui University. The GIXRD and XRR analyses were carried out in the Center for Research Facilities, Chungnam National University and the Korea Base Science Institute, respectively. The nanoindentation testing was performed in the National NanoFab Center, Korea Advanced Institute of Science and Technology. The frequency-domain photoacoustic microscopy was conducted in the Center for Smart Structures and Materials, Northwestern University. Publisher Copyright: {\textcopyright} 2021 Elsevier B.V.",

year = "2022",

month = jan,

day = "31",

doi = "10.1016/j.tsf.2021.139050",

language = "English (US)",

volume = "742",

journal = "Thin Solid Films",

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T1 - Nanomechanical property evaluation of tungsten thin film via frequency-domain photoacoustic microscopy

AU - Wang, Ziwei

AU - Balogun, Oluwaseyi

AU - Kim, Yun Young

N1 - Funding Information: This work was supported by the research fund of Chungnam National University. The W sample was prepared in the UNIST Central Research Facilities. The SEM-EDX analysis was conducted in the Electro Ceramics Center, Dong-eui University. The GIXRD and XRR analyses were carried out in the Center for Research Facilities, Chungnam National University and the Korea Base Science Institute, respectively. The nanoindentation testing was performed in the National NanoFab Center, Korea Advanced Institute of Science and Technology. The frequency-domain photoacoustic microscopy was conducted in the Center for Smart Structures and Materials, Northwestern University. Publisher Copyright: © 2021 Elsevier B.V.

PY - 2022/1/31

Y1 - 2022/1/31

N2 - This study investigates the reduction in nanomechanical properties of a tungsten (W) thin film measured using a laser ultrasonic technique. A 96 nm thick W film was prepared via direct-current magnetron sputtering and inspected using scanning electron microscopy with energy dispersive X-ray spectroscopy, X-ray diffraction, and X-ray reflectivity techniques. Moreover, frequency-domain photoacoustic microscopy was employed to evaluate the Young's modulus (EW) of W. The velocity dispersion of a surface acoustic wave excited by an intensity-modulated laser was measured and curve-fitted using a computational finite element model to estimate EW. In addition, a high-frequency microcantilever resonance test was performed to verify the results. The results show that EW of the film is 45.3% lower than that of the macroscopic property because of the predominant β-W phase. The Young's moduli obtained from the two different techniques agree well with each other, with a relative error of 13.3%. The hardness-to-EW ratio obtained using a nanoindenter was calculated to be 0.025±0.004.

AB - This study investigates the reduction in nanomechanical properties of a tungsten (W) thin film measured using a laser ultrasonic technique. A 96 nm thick W film was prepared via direct-current magnetron sputtering and inspected using scanning electron microscopy with energy dispersive X-ray spectroscopy, X-ray diffraction, and X-ray reflectivity techniques. Moreover, frequency-domain photoacoustic microscopy was employed to evaluate the Young's modulus (EW) of W. The velocity dispersion of a surface acoustic wave excited by an intensity-modulated laser was measured and curve-fitted using a computational finite element model to estimate EW. In addition, a high-frequency microcantilever resonance test was performed to verify the results. The results show that EW of the film is 45.3% lower than that of the macroscopic property because of the predominant β-W phase. The Young's moduli obtained from the two different techniques agree well with each other, with a relative error of 13.3%. The hardness-to-EW ratio obtained using a nanoindenter was calculated to be 0.025±0.004.

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Nanomechanical property evaluation of tungsten thin film via frequency-domain photoacoustic microscopy

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