Nanomechanoelectronic signal transduction scheme with metal-oxide- semiconductor field-effect transistor-embedded microcantilevers

Soo Hyun Tark, Arvind Srivastava, Stanley Chou, Gajendra Shekhawat, Vinayak P. Dravid

Research output: Contribution to journalArticlepeer-review

22 Scopus citations

Abstract

We explore various metal-oxide-semiconductor field-effect transistor (MOSFET)-embedded microcantilever designs to assess their performance as an efficient nanomechanoelectronic signal transduction platform for monitoring deflection in microcantilever-based phenomena such as biochemical sensing and actuation. The current-voltage characteristics of embedded MOSFETs show current noise in the nanoampere range with a large signal-to-noise ratio sufficient to provide measureable output signal. The change in drain current with cantilever deflection is consistent with the effect of stress on carrier mobility and drain current reported in previous studies, validating that the MOSFET cantilevers can directly transduce deflection of a microcantilever into reproducible change in electrical signal.

Original languageEnglish (US)
Article number104101
JournalApplied Physics Letters
Volume94
Issue number10
DOIs
StatePublished - 2009

Funding

This work was supported primarily by the Nanoscale Science and Engineering Initiative of the National Science Foundation under NSF Grant Nos. EEC-0647560 and ECCS-0330410. Any opinions, findings, and conclusions or recommendations expressed in this material are those of the authors and do not necessarily reflect those of the National Science Foundation. The experiments were performed in the EPIC and NIFTI facilities of NUANCE Center at Northwestern University. The NUANCE Center is supported by NSF-NSEC, NSF-MRSEC, Keck Foundation, the State of Illinois, and Northwestern University.

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

Fingerprint

Dive into the research topics of 'Nanomechanoelectronic signal transduction scheme with metal-oxide- semiconductor field-effect transistor-embedded microcantilevers'. Together they form a unique fingerprint.

Cite this