Nanopatterned polycrystalline ZnO for room temperature gas sensing

Shan Wei Fan; Arvind K. Srivastava; Vinayak P. Dravid

doi:10.1016/j.snb.2009.10.054

Nanopatterned polycrystalline ZnO for room temperature gas sensing

Shan Wei Fan, Arvind K. Srivastava, Vinayak P. Dravid^*

^*Corresponding author for this work

Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

77 Scopus citations

Abstract

We demonstrate that the soft e-beam lithography (soft-eBL) fabricated polycrystalline ZnO nanolines show reproducible response to ppm-level H₂ and NO₂ even at room temperature, due to the intrinsic Joule heating effect in such nanodevices. The Joule heating effect is confirmed by studying the resistance-temperature relationship of the sensor as well as the persistent photoconductivity phenomena in ZnO. We note that Joule heating increases the nanoline temperature to around 72 °C, which enhances the oxidation-reduction reaction at the ZnO surface. Therefore, the nanolines show faster photoresponse than the thin film. These results may help tailor and optimize gas sensor devices for improved performance.

Original language	English (US)
Pages (from-to)	159-163
Number of pages	5
Journal	Sensors and Actuators, B: Chemical
Volume	144
Issue number	1
DOIs	https://doi.org/10.1016/j.snb.2009.10.054
State	Published - Jan 29 2010

Keywords

Gas sensor
Room temperature gas sensing
UV light
ZnO

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering
Materials Chemistry

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title = "Nanopatterned polycrystalline ZnO for room temperature gas sensing",

abstract = "We demonstrate that the soft e-beam lithography (soft-eBL) fabricated polycrystalline ZnO nanolines show reproducible response to ppm-level H2 and NO2 even at room temperature, due to the intrinsic Joule heating effect in such nanodevices. The Joule heating effect is confirmed by studying the resistance-temperature relationship of the sensor as well as the persistent photoconductivity phenomena in ZnO. We note that Joule heating increases the nanoline temperature to around 72 °C, which enhances the oxidation-reduction reaction at the ZnO surface. Therefore, the nanolines show faster photoresponse than the thin film. These results may help tailor and optimize gas sensor devices for improved performance.",

keywords = "Gas sensor, Room temperature gas sensing, UV light, ZnO",

author = "Fan, {Shan Wei} and Srivastava, {Arvind K.} and Dravid, {Vinayak P.}",

note = "Funding Information: The author would like to thank Prof. T. Mason at Northwestern University for the helpful discussion and suggestion. This research work was primarily supported by US-DOE Award Number DE-FG02-07ER46444 . The sensor experimental set-up and software/hardware development was initially supported by NSF-NSEC Award Number EEC-0647560 . The research was performed in the EPIC facility of NUANCE Center at Northwestern University. NUANCE Center is supported by NSF-NSEC, NSF-MRSEC, Keck Foundation, the State of Illinois, and Northwestern University. Copyright: Copyright 2010 Elsevier B.V., All rights reserved.",

year = "2010",

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doi = "10.1016/j.snb.2009.10.054",

language = "English (US)",

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AU - Fan, Shan Wei

AU - Srivastava, Arvind K.

AU - Dravid, Vinayak P.

N1 - Funding Information: The author would like to thank Prof. T. Mason at Northwestern University for the helpful discussion and suggestion. This research work was primarily supported by US-DOE Award Number DE-FG02-07ER46444 . The sensor experimental set-up and software/hardware development was initially supported by NSF-NSEC Award Number EEC-0647560 . The research was performed in the EPIC facility of NUANCE Center at Northwestern University. NUANCE Center is supported by NSF-NSEC, NSF-MRSEC, Keck Foundation, the State of Illinois, and Northwestern University. Copyright: Copyright 2010 Elsevier B.V., All rights reserved.

PY - 2010/1/29

Y1 - 2010/1/29

N2 - We demonstrate that the soft e-beam lithography (soft-eBL) fabricated polycrystalline ZnO nanolines show reproducible response to ppm-level H2 and NO2 even at room temperature, due to the intrinsic Joule heating effect in such nanodevices. The Joule heating effect is confirmed by studying the resistance-temperature relationship of the sensor as well as the persistent photoconductivity phenomena in ZnO. We note that Joule heating increases the nanoline temperature to around 72 °C, which enhances the oxidation-reduction reaction at the ZnO surface. Therefore, the nanolines show faster photoresponse than the thin film. These results may help tailor and optimize gas sensor devices for improved performance.

AB - We demonstrate that the soft e-beam lithography (soft-eBL) fabricated polycrystalline ZnO nanolines show reproducible response to ppm-level H2 and NO2 even at room temperature, due to the intrinsic Joule heating effect in such nanodevices. The Joule heating effect is confirmed by studying the resistance-temperature relationship of the sensor as well as the persistent photoconductivity phenomena in ZnO. We note that Joule heating increases the nanoline temperature to around 72 °C, which enhances the oxidation-reduction reaction at the ZnO surface. Therefore, the nanolines show faster photoresponse than the thin film. These results may help tailor and optimize gas sensor devices for improved performance.

KW - Gas sensor

KW - Room temperature gas sensing

KW - UV light

KW - ZnO

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Nanopatterned polycrystalline ZnO for room temperature gas sensing

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Keywords

ASJC Scopus subject areas

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