Nanopatterning of multiferroic BiFeO 3 using "soft" electron beam lithography

Tao Sun*, Zixiao Pan, Vinayak P. Dravid, Zhaoyu Wang, Min Feng Yu, Jin Wang

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

23 Scopus citations


The authors report fabrication of multiferroic BiFe O3 (BFO) by the soft electron beam lithography technique. BiFe O3 nanopatterns with less than 100 nm characteristic dimension are fabricated from its liquid-phase precursor on diverse substrates. The chemical constituents and phase purity are characterized by transmission electron microscopy. The ferroelectric behavior is confirmed by piezoresponse force microscopy. A saturation magnetization of about 10 emu cm3 is observed, demonstrating the multiferroic characteristic of the BFO nanopatterns. Furthermore, the BFO nanolines pattened on SrTi O3 substrate exhibit a bamboolike structure, which can serve as an excellent model system for investigating the contribution of grain boundaries to the leakage current.

Original languageEnglish (US)
Article number163117
JournalApplied Physics Letters
Issue number16
StatePublished - 2006

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


Dive into the research topics of 'Nanopatterning of multiferroic BiFeO <sub>3</sub> using "soft" electron beam lithography'. Together they form a unique fingerprint.

Cite this