Nanopatterning with conformable phase masks

Keyphrases

• Atomic Contacts 50%
• Modeling Results 50%
• Nanofabrication 50%
• Nanopatterning 100%
• Near-field 50%
• New Modeling 50%
• Optics 50%
• Organic Transistors 50%
• Pattern Structures 50%
• Phase Mask 100%
• Phase-shift Lithography 50%
• Photoresist Material 50%
• Representative Structures 50%
• Ultraviolet Exposure 50%

Engineering

• Critical Dimension 50%
• Illustrates 50%
• Lithography 50%
• Nanofabrication Process 50%
• Nanopatterning 100%
• Phase Mask 100%
• Phase Shift 50%
• Photoresist Material 50%
• Simple Approach 50%

Material Science

• Lithography 100%
• Transistor 100%