Nanophotodetector array for near-field nano-imaging

Boyang Liu*, Yingyan Huang, Young Kim Ki, Seng Tiong Ho

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A novel near-field nano-imaging device based on nanophotodetector (NPD) array is presented. Simulation shows the smallest obtainable resolution is 150nm for 1.55μm wavelength. Various photolithography, e-beam lithography, wafer bonding and etching back techniques have been developed to realize the thin-film based photodetector structures. A slab version NPD device has been successfully fabricated. The smallest pixel size is as small as 100nm.

Original languageEnglish (US)
Title of host publication2008 2nd IEEE International Nanoelectronics Conference, INEC 2008
Pages607-609
Number of pages3
DOIs
StatePublished - 2008
Event2008 2nd IEEE International Nanoelectronics Conference, INEC 2008 - Shanghai, China
Duration: Mar 24 2008Mar 27 2008

Publication series

Name2008 2nd IEEE International Nanoelectronics Conference, INEC 2008

Other

Other2008 2nd IEEE International Nanoelectronics Conference, INEC 2008
Country/TerritoryChina
CityShanghai
Period3/24/083/27/08

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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