TY - GEN
T1 - Nanophotodetector array for near-field nano-imaging
AU - Liu, Boyang
AU - Huang, Yingyan
AU - Ki, Young Kim
AU - Ho, Seng Tiong
PY - 2008
Y1 - 2008
N2 - A novel near-field nano-imaging device based on nanophotodetector (NPD) array is presented. Simulation shows the smallest obtainable resolution is 150nm for 1.55μm wavelength. Various photolithography, e-beam lithography, wafer bonding and etching back techniques have been developed to realize the thin-film based photodetector structures. A slab version NPD device has been successfully fabricated. The smallest pixel size is as small as 100nm.
AB - A novel near-field nano-imaging device based on nanophotodetector (NPD) array is presented. Simulation shows the smallest obtainable resolution is 150nm for 1.55μm wavelength. Various photolithography, e-beam lithography, wafer bonding and etching back techniques have been developed to realize the thin-film based photodetector structures. A slab version NPD device has been successfully fabricated. The smallest pixel size is as small as 100nm.
UR - http://www.scopus.com/inward/record.url?scp=52649142781&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=52649142781&partnerID=8YFLogxK
U2 - 10.1109/INEC.2008.4585560
DO - 10.1109/INEC.2008.4585560
M3 - Conference contribution
AN - SCOPUS:52649142781
SN - 9781424415731
T3 - 2008 2nd IEEE International Nanoelectronics Conference, INEC 2008
SP - 607
EP - 609
BT - 2008 2nd IEEE International Nanoelectronics Conference, INEC 2008
T2 - 2008 2nd IEEE International Nanoelectronics Conference, INEC 2008
Y2 - 24 March 2008 through 27 March 2008
ER -