Nanoscale control of friction and chemistry on silicon surfaces

Andrew S. Baluch; Rajiv Basu; Nathan P. Guisinger; C. Reagan Kinser; Donald E. Kramer; Matthew W. Such; Mark C. Hersam

doi:10.1557/proc-750-y9.1

Nanoscale control of friction and chemistry on silicon surfaces

Andrew S. Baluch^*, Rajiv Basu, Nathan P. Guisinger, C. Reagan Kinser, Donald E. Kramer, Matthew W. Such, Mark C. Hersam

^*Corresponding author for this work

Research output: Contribution to journal › Conference article › peer-review

Original language	English (US)
Pages (from-to)	539-548
Number of pages	10
Journal	Materials Research Society Symposium - Proceedings
Volume	750
DOIs	https://doi.org/10.1557/proc-750-y9.1
State	Published - 2002
Event	Surface Engineering 2002 Sythesis, Characterization and Applications - Boston, MA, United States Duration: Dec 2 2002 → Dec 5 2002

ASJC Scopus subject areas

General Materials Science
Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering

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10.1557/proc-750-y9.1

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@article{1314f2a94bf2477b947ef2e88b368a5f,

title = "Nanoscale control of friction and chemistry on silicon surfaces",

author = "Baluch, {Andrew S.} and Rajiv Basu and Guisinger, {Nathan P.} and Kinser, {C. Reagan} and Kramer, {Donald E.} and Such, {Matthew W.} and Hersam, {Mark C.}",

year = "2002",

doi = "10.1557/proc-750-y9.1",

language = "English (US)",

volume = "750",

pages = "539--548",

journal = "Materials Research Society Symposium - Proceedings",

issn = "0272-9172",

publisher = "Materials Research Society",

note = "Surface Engineering 2002 Sythesis, Characterization and Applications ; Conference date: 02-12-2002 Through 05-12-2002",

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TY - JOUR

T1 - Nanoscale control of friction and chemistry on silicon surfaces

AU - Baluch, Andrew S.

AU - Basu, Rajiv

AU - Guisinger, Nathan P.

AU - Kinser, C. Reagan

AU - Kramer, Donald E.

AU - Such, Matthew W.

AU - Hersam, Mark C.

PY - 2002

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U2 - 10.1557/proc-750-y9.1

DO - 10.1557/proc-750-y9.1

M3 - Conference article

AN - SCOPUS:0041464839

SN - 0272-9172

VL - 750

SP - 539

EP - 548

JO - Materials Research Society Symposium - Proceedings

JF - Materials Research Society Symposium - Proceedings

T2 - Surface Engineering 2002 Sythesis, Characterization and Applications

Y2 - 2 December 2002 through 5 December 2002

ER -

Nanoscale control of friction and chemistry on silicon surfaces

ASJC Scopus subject areas

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