Nanoscale control of friction and chemistry on silicon surfaces

Andrew S. Baluch*, Rajiv Basu, Nathan P. Guisinger, C. Reagan Kinser, Donald E. Kramer, Matthew W. Such, Mark C. Hersam

*Corresponding author for this work

Research output: Contribution to journalConference article

Original languageEnglish (US)
Pages (from-to)539-548
Number of pages10
JournalMaterials Research Society Symposium - Proceedings
Volume750
DOIs
StatePublished - Jan 1 2002
EventSurface Engineering 2002 Sythesis, Characterization and Applications - Boston, MA, United States
Duration: Dec 2 2002Dec 5 2002

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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