Nanoscale elastic imaging: A new metrology tool for low-k dielectric integration

G. S. Shekhawat, O. V. Kolosov, G. A D Briggs, E. O. Shaffer, S. J. Martin, R. E. Geer

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Scopus citations

Fingerprint

Dive into the research topics of 'Nanoscale elastic imaging: A new metrology tool for low-k dielectric integration'. Together they form a unique fingerprint.

Engineering & Materials Science