Fingerprint Dive into the research topics of 'Nanoscale elastic imaging of micro-electro-mechanical system based micro-mirrors'. Together they form a unique fingerprint.
- Sort by
- Weight
- Alphabetically
Nanoscale elastic imaging of micro-electro-mechanical system based micro-mirrors
Bruce Altemus, Gajendra Shekhawat, Bai Xu*, Robert Geer, James Castracane
*Corresponding author for this work
Research output: Contribution to journal › Conference article › peer-review
2
Scopus
citations