Keyphrases
Systems-based
100%
Micro-electro-mechanical Systems
100%
Micromirror
100%
Elasticity Imaging
100%
Polysilicon
66%
MEMS Devices
66%
Hinge Structure
66%
Ultrasonic Force Microscopy
66%
Characterization Techniques
33%
Structural Change
33%
Atomic Force Microscopy
33%
Mechanical Stress
33%
New Characterization
33%
Non-destructive
33%
Structural Integrity
33%
Mechanical Integrity
33%
Elastic Properties
33%
Simultaneous Recording
33%
High Stress
33%
Stress-induced
33%
Reliability Characterization
33%
Support Structure
33%
Mechanical Changes
33%
Elastic Response
33%
MHz Frequency
33%
Ultrasonic Excitation
33%
Material Fatigue
33%
Mirror Device
33%
Micromirror Array
33%
Switching Cycle
33%
Hinge Support
33%
Engineering
Micro-Electro-Mechanical System
100%
Nanoscale
100%
Ultrasonics
100%
Microelectromechanical System
66%
Polysilicon
66%
Induced Change
33%
Fatigue Resistance
33%
Elastic Response
33%
Mechanical Stress
33%
Supporting Structure
33%
Atomic Force Microscopy
33%