Nanoscale elastic imaging of micro-electro-mechanical system based micro-mirrors

Keyphrases

• Atomic Force Microscopy 33%
• Characterization Techniques 33%
• Elastic Properties 33%
• Elastic Response 33%
• Elasticity Imaging 100%
• High Stress 33%
• Hinge Structure 66%
• Hinge Support 33%
• Material Fatigue 33%
• Mechanical Changes 33%
• Mechanical Integrity 33%
• Mechanical Stress 33%
• MEMS Devices 66%
• MHz Frequency 33%
• Micro-electro-mechanical Systems 100%
• Micromirror 100%
• Micromirror Array 33%
• Mirror Device 33%
• New Characterization 33%
• Non-destructive 33%
• Polysilicon 66%
• Reliability Characterization 33%
• Simultaneous Recording 33%
• Stress-induced 33%
• Structural Change 33%
• Structural Integrity 33%
• Support Structure 33%
• Switching Cycle 33%
• Systems-based 100%
• Ultrasonic Excitation 33%
• Ultrasonic Force Microscopy 66%

Engineering

• Atomic Force Microscopy 33%
• Elastic Response 33%
• Fatigue Resistance 33%
• Induced Change 33%
• Mechanical Stress 33%
• Micro-Electro-Mechanical System 100%
• Microelectromechanical System 66%
• Nanoscale 100%
• Polysilicon 66%
• Supporting Structure 33%
• Ultrasonics 100%