Nanoscale x-ray imaging of circuit features without wafer etching

Junjing Deng, Young Pyo Hong, Si Chen, Youssef S.G. Nashed, Tom Peterka, Anthony J.F. Levi, John Damoulakis, Sayan Saha, Travis Eiles, Chris Jacobsen*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

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