Abstract
The fabrication of polyelectrolyte multilayer (PEM) films on dippen nanolithography (DPN) generated mercaptohexadecanoic acid (MHA) patterns by alternating the exposure of the pattern features to aqueous polyelectrolyte solutions, was analyzed. PEM films can be formed by sequentially immersing substrates into solutions of oppositely charges polyions. DPN is a direct-write scanning probe based lithography that utilizes a cantilever tip to deliver various reagents to nanoscopic regions of a target substrates with high resolution and registration. The substrate generality and ability to interface soft matter with hard inorganic substrates makes DPN suitable for the process.
Original language | English (US) |
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Pages (from-to) | 2749-2753 |
Number of pages | 5 |
Journal | Advanced Materials |
Volume | 17 |
Issue number | 22 |
DOIs | |
State | Published - Nov 18 2005 |
ASJC Scopus subject areas
- General Materials Science
- Mechanics of Materials
- Mechanical Engineering