@inproceedings{d6e771987be54d67a7fedd29510b2cf1,
title = "Near-field nano-imaging by nanophotodetector array",
abstract = "The possibility of imaging objects at the resolution of smaller than the optical diffraction limit is of great interest to nanotechnologies and biotechnologies. In this paper, we present a novel near-filed nano-imaging device based on nanophotodetector(NPD) array, which is capable of addressing function. Multi-level Multi-electron(MLME) Finitedifference time-domain(FDTD) method is used to simulate the performance of NPD array. The simulation shows a highest obtainable resolution of 150nm for the light with 1.55μm wavelength. Various photolithography, e-beam lithography and etching back techniques have been developed to realize the NPD device. Up to 4x4 slab version NPD array with various resolutions have been successfully realized. The smallest pixel size is as small as 150nm.",
keywords = "Nano-imaging, Nanophotodetector, Near field, Photodetector array",
author = "Boyang Liu and Kim, {Ki Young} and Yingyan Huang and Ho, {Seng Tiong}",
year = "2009",
doi = "10.1117/12.808635",
language = "English (US)",
isbn = "9780819474643",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Integrated Optics",
note = "Integrated Optics: Devices, Materials, and Technologies XIII ; Conference date: 26-01-2009 Through 28-01-2009",
}