Near-field nano-imaging by nanophotodetector array

Boyang Liu*, Ki Young Kim, Yingyan Huang, Seng Tiong Ho

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution


The possibility of imaging objects at the resolution of smaller than the optical diffraction limit is of great interest to nanotechnologies and biotechnologies. In this paper, we present a novel near-filed nano-imaging device based on nanophotodetector(NPD) array, which is capable of addressing function. Multi-level Multi-electron(MLME) Finitedifference time-domain(FDTD) method is used to simulate the performance of NPD array. The simulation shows a highest obtainable resolution of 150nm for the light with 1.55μm wavelength. Various photolithography, e-beam lithography and etching back techniques have been developed to realize the NPD device. Up to 4x4 slab version NPD array with various resolutions have been successfully realized. The smallest pixel size is as small as 150nm.

Original languageEnglish (US)
Title of host publicationIntegrated Optics
Subtitle of host publicationDevices, Materials, and Technologies XIII
StatePublished - Jun 16 2009
EventIntegrated Optics: Devices, Materials, and Technologies XIII - San Jose, CA, United States
Duration: Jan 26 2009Jan 28 2009

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


OtherIntegrated Optics: Devices, Materials, and Technologies XIII
Country/TerritoryUnited States
CitySan Jose, CA


  • Nano-imaging
  • Nanophotodetector
  • Near field
  • Photodetector array

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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