Near-field scanning laser source technique and microfabricated ultrasound receiver

Y. Sohn*, Sridhar Krishnaswamy

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution


The scanning laser source (SLS) technique has been proposed recently as an effective way to investigate small surface-breaking defects. We now propose an extension of the SLS approach to map surface-breaking defects by bringing both the source and the receiver to the near-field scattering region of the defects. For the purpose of near-field ultrasound measurement, silicon microcantilever probes are fabricated and their acoustical characteristics are investigated. The fundamental frequency of the microcantilever is measured and compared with analytically calculated fundamental frequency. The performance of the fabricated microcantilevers as ultrasound detectors is investigated. Broadband ultrasound is generated by a laser source and the resulting surface acoustic displacements are monitored using the microcantilever probe in the near-field of the source. Both the laser-generated ultrasonic source and the microcantilever probe are used to monitor near-field scattering by a surface-breaking defect.

Original languageEnglish (US)
Title of host publicationReview of Progress in Quantitative Nondestructive Evaluation
Subtitle of host publicationVolume 25B
Number of pages7
Volume820 II
StatePublished - Mar 6 2006
EventReview of Progress in Quantitative Nondestructive - Brunswick, ME, United States
Duration: Jul 31 2005Aug 5 2005


OtherReview of Progress in Quantitative Nondestructive
Country/TerritoryUnited States
CityBrunswick, ME


  • Laser ultrasonics
  • Microcantilever
  • Near-field ultrasound
  • Scanning laser source technique
  • Surface-breaking defect

ASJC Scopus subject areas

  • Physics and Astronomy(all)


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