Near perfect heteroepitaxy of diamond islands on Si(111)

X. Liu, J. R. Babcock, M. A. Lane, J. A. Belot, A. W. Ott, M. V. Metz, C. R. Kannewurf, R. P.H. Chang, T. J. Marks

Research output: Contribution to journalArticlepeer-review


Near diamond island structures on Si(111) were grown by microwave PECVD at low methane concentration and high substrate temperature. The (111) plane isolated diamond islands are well aligned on the substrate with the mosaic distribution of 0.03 FWHM. The high strain in the isolated islands was relieved on contact with other islands.

Original languageEnglish (US)
Pages (from-to)22-24
Number of pages3
JournalAdvanced Materials
Issue number2
StatePublished - Jan 2001

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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