Nitrogen stabilized reactive sputtering of optimized TiO2-x photocatalysts with visible light reactivity

Le Chen; Michael E. Graham; Kimberly A. Gray

doi:10.1116/1.3139906

Nitrogen stabilized reactive sputtering of optimized TiO2-x photocatalysts with visible light reactivity

Le Chen, Michael E. Graham, Kimberly A. Gray

Civil and Environmental Engineering

Research output: Contribution to journal › Article › peer-review

8 Scopus citations

Abstract

Photoreactive and visible light responsive nonstoichiometric mixed-phase titania was prepared by reactive direct current magnetron sputtering. Trace amounts of nitrogen were added for process stabilization without being incorporated into the films. Based on the CO ₂ photoreduction tests and structural and optical characterization, the influence of the trace nitrogen on the sputtered nonstoichiometric TiO ₂ was studied and was compared to nitrogen-doped titania.

Original language	English (US)
Pages (from-to)	712-715
Number of pages	4
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	27
Issue number	4
DOIs	https://doi.org/10.1116/1.3139906
State	Published - 2009

ASJC Scopus subject areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

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title = "Nitrogen stabilized reactive sputtering of optimized TiO2-x photocatalysts with visible light reactivity",

abstract = "Photoreactive and visible light responsive nonstoichiometric mixed-phase titania was prepared by reactive direct current magnetron sputtering. Trace amounts of nitrogen were added for process stabilization without being incorporated into the films. Based on the CO 2 photoreduction tests and structural and optical characterization, the influence of the trace nitrogen on the sputtered nonstoichiometric TiO 2 was studied and was compared to nitrogen-doped titania.",

author = "Le Chen and Graham, {Michael E.} and Gray, {Kimberly A.}",

note = "Funding Information: The authors acknowledge U.S. Department of Energy (Grant Nos. DE-FG02-03ER15457/A003 and DE-AC02-06CH11358) for the financial support of this study. Characterization (XRD, AFM, TEM, and SEM) was performed in the MRSEC and NUANCE at Northwestern University.",

year = "2009",

doi = "10.1116/1.3139906",

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issn = "0734-2101",

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T1 - Nitrogen stabilized reactive sputtering of optimized TiO2-x photocatalysts with visible light reactivity

AU - Chen, Le

AU - Graham, Michael E.

AU - Gray, Kimberly A.

N1 - Funding Information: The authors acknowledge U.S. Department of Energy (Grant Nos. DE-FG02-03ER15457/A003 and DE-AC02-06CH11358) for the financial support of this study. Characterization (XRD, AFM, TEM, and SEM) was performed in the MRSEC and NUANCE at Northwestern University.

PY - 2009

Y1 - 2009

N2 - Photoreactive and visible light responsive nonstoichiometric mixed-phase titania was prepared by reactive direct current magnetron sputtering. Trace amounts of nitrogen were added for process stabilization without being incorporated into the films. Based on the CO 2 photoreduction tests and structural and optical characterization, the influence of the trace nitrogen on the sputtered nonstoichiometric TiO 2 was studied and was compared to nitrogen-doped titania.

AB - Photoreactive and visible light responsive nonstoichiometric mixed-phase titania was prepared by reactive direct current magnetron sputtering. Trace amounts of nitrogen were added for process stabilization without being incorporated into the films. Based on the CO 2 photoreduction tests and structural and optical characterization, the influence of the trace nitrogen on the sputtered nonstoichiometric TiO 2 was studied and was compared to nitrogen-doped titania.

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Nitrogen stabilized reactive sputtering of optimized TiO2-x photocatalysts with visible light reactivity

Abstract

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