Nitrogen stabilized reactive sputtering of optimized TiO2-x photocatalysts with visible light reactivity

Le Chen, Michael E. Graham, Kimberly A. Gray

Research output: Contribution to journalArticlepeer-review

8 Scopus citations

Abstract

Photoreactive and visible light responsive nonstoichiometric mixed-phase titania was prepared by reactive direct current magnetron sputtering. Trace amounts of nitrogen were added for process stabilization without being incorporated into the films. Based on the CO 2 photoreduction tests and structural and optical characterization, the influence of the trace nitrogen on the sputtered nonstoichiometric TiO 2 was studied and was compared to nitrogen-doped titania.

Original languageEnglish (US)
Pages (from-to)712-715
Number of pages4
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume27
Issue number4
DOIs
StatePublished - 2009

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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