Non-contact real-time evaluation of polyimide thin film thermoelastic properties through impulsive stimulated thermal scattering

J. A. Rogers*, A. R. Duggal, K. A. Nelson

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

We demonstrate a new purely optical based method for the excitation and detection of acoustic and thermal disturbances in thin films. This technique is applied to the determination of the viscoelastic properties of supported and unsupported and silicon supported polyimide thin (≈1 micron) films. We show how this technique can be used to detect film delamination and suggest how it may be used to probe film-substrate adhesion quality.

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposium Proceedings
EditorsJerzy Kanicki, William L. Warren, Roderick A.B. Devine, Masakiyo Matsumura
PublisherPubl by Materials Research Society
Pages547-5522
Number of pages4976
ISBN (Print)1558991794
StatePublished - Dec 1 1993
EventProceedings of a Symposium on Amorphous Insulating Thin Films - Boston, MA, USA
Duration: Dec 1 1992Dec 4 1992

Publication series

NameMaterials Research Society Symposium Proceedings
Volume284
ISSN (Print)0272-9172

Other

OtherProceedings of a Symposium on Amorphous Insulating Thin Films
CityBoston, MA, USA
Period12/1/9212/4/92

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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