@inproceedings{abf87d81750146a3a622c680126bbdad,
title = "Non-contact real-time evaluation of polyimide thin film thermoelastic properties through impulsive stimulated thermal scattering",
abstract = "We demonstrate a new purely optical based method for the excitation and detection of acoustic and thermal disturbances in thin films. This technique is applied to the determination of the viscoelastic properties of supported and unsupported and silicon supported polyimide thin (≈1 micron) films. We show how this technique can be used to detect film delamination and suggest how it may be used to probe film-substrate adhesion quality.",
author = "Rogers, {J. A.} and Duggal, {A. R.} and Nelson, {K. A.}",
year = "1993",
month = dec,
day = "1",
language = "English (US)",
isbn = "1558991794",
series = "Materials Research Society Symposium Proceedings",
publisher = "Publ by Materials Research Society",
pages = "547--5522",
editor = "Jerzy Kanicki and Warren, {William L.} and Devine, {Roderick A.B.} and Masakiyo Matsumura",
booktitle = "Materials Research Society Symposium Proceedings",
note = "Proceedings of a Symposium on Amorphous Insulating Thin Films ; Conference date: 01-12-1992 Through 04-12-1992",
}