Noncontact optical characterization of thermal and mechanical properties of thin films

John A. Rogers; Keith A. Nelson

doi:10.1117/12.147064

Noncontact optical characterization of thermal and mechanical properties of thin films

John A. Rogers, Keith A. Nelson

Research output: Contribution to journal › Conference article › peer-review

3 Scopus citations

Abstract

We demonstrate a new purely optical based real-time method for excitation and detection of acoustic and thermal disturbances in thin films. The technique is applied to the determination of viscoelastic properties of unsupported and silicon-supported polyimide thin (~1 micron) films. By comparing data from supported films with that from unsupported films, we demonstrate the sensitivity of this technique to delaminations. We then present calculations that suggest how the same technique may be used to probe film-substrate adhesive quality.

Original language	English (US)
Pages (from-to)	314-325
Number of pages	12
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	1861
DOIs	https://doi.org/10.1117/12.147064
State	Published - Jun 17 1993
Externally published	Yes
Event	Ultrafast Pulse Generation and Spectroscopy 1993 - Los Angeles, United States Duration: Jan 17 1993 → Jan 22 1993

Funding

contributions of A.R. Duggal in the silicon supported film work. This work was supported in part by NSF Grant No. DAR-90002279.

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.147064

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abstract = "We demonstrate a new purely optical based real-time method for excitation and detection of acoustic and thermal disturbances in thin films. The technique is applied to the determination of viscoelastic properties of unsupported and silicon-supported polyimide thin (~1 micron) films. By comparing data from supported films with that from unsupported films, we demonstrate the sensitivity of this technique to delaminations. We then present calculations that suggest how the same technique may be used to probe film-substrate adhesive quality.",

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AU - Nelson, Keith A.

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N2 - We demonstrate a new purely optical based real-time method for excitation and detection of acoustic and thermal disturbances in thin films. The technique is applied to the determination of viscoelastic properties of unsupported and silicon-supported polyimide thin (~1 micron) films. By comparing data from supported films with that from unsupported films, we demonstrate the sensitivity of this technique to delaminations. We then present calculations that suggest how the same technique may be used to probe film-substrate adhesive quality.

AB - We demonstrate a new purely optical based real-time method for excitation and detection of acoustic and thermal disturbances in thin films. The technique is applied to the determination of viscoelastic properties of unsupported and silicon-supported polyimide thin (~1 micron) films. By comparing data from supported films with that from unsupported films, we demonstrate the sensitivity of this technique to delaminations. We then present calculations that suggest how the same technique may be used to probe film-substrate adhesive quality.

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M3 - Conference article

AN - SCOPUS:84919227216

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EP - 325

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Ultrafast Pulse Generation and Spectroscopy 1993

Y2 - 17 January 1993 through 22 January 1993

ER -

Noncontact optical characterization of thermal and mechanical properties of thin films

Abstract

Funding

ASJC Scopus subject areas

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