Noncontact optical characterization of thermal and mechanical properties of thin films

John A. Rogers, Keith A. Nelson

Research output: Contribution to journalConference articlepeer-review

3 Scopus citations

Abstract

We demonstrate a new purely optical based real-time method for excitation and detection of acoustic and thermal disturbances in thin films. The technique is applied to the determination of viscoelastic properties of unsupported and silicon-supported polyimide thin (~1 micron) films. By comparing data from supported films with that from unsupported films, we demonstrate the sensitivity of this technique to delaminations. We then present calculations that suggest how the same technique may be used to probe film-substrate adhesive quality.

Original languageEnglish (US)
Pages (from-to)314-325
Number of pages12
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume1861
DOIs
StatePublished - Jun 17 1993
Externally publishedYes
EventUltrafast Pulse Generation and Spectroscopy 1993 - Los Angeles, United States
Duration: Jan 17 1993Jan 22 1993

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

Fingerprint

Dive into the research topics of 'Noncontact optical characterization of thermal and mechanical properties of thin films'. Together they form a unique fingerprint.

Cite this