Noncontact planar stage based on near-field acoustic transportation

Yang Yang, Keyu Chen, Ping Guo*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

Abstract

Acoustic radiation force in the near-field of a vibrating source can be utilized to lift and transport objects, which provides a noncontact driving technology in addition to maglev. This paper presents a novel design of a self-levitated planar stage based on near-field acoustic transportation. A closed-loop system is proposed to design a capacitance surface encoder to provide direct two-dimensional (2D) position feedback. A dynamic model based on the Reynolds equation is established to study its driving mechanism. A prototype including the levitation stage, encoder, and controller is implemented to demonstrate the potential of arbitrary trajectory tracking in two-dimensional space.

Original languageEnglish (US)
Article number021002-1
JournalJournal of Micro and Nano-Manufacturing
Volume8
Issue number2
DOIs
StatePublished - Jun 2020

Keywords

  • Encoder
  • Near-field acoustics
  • Planar stage
  • Vibration

ASJC Scopus subject areas

  • Mechanics of Materials
  • Process Chemistry and Technology
  • Industrial and Manufacturing Engineering

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