Noncontact quantitative spatial mapping of stress and flexural rigidity in thin membranes using a picosecond transient grating photoacoustic technique

J. A. Rogers*, G. R. Bogart, R. E. Miller

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Abstract

This paper describes a purely optical technique for measuring and spatially mapping out stress and rigidity in thin membranes. Its application to a membrane of aluminum nitride that has significant spatial nonuniformities in its elastic properties demonstrates the method. The attractive features of this technique - fast, noncontacting measurement, good spatial resolution, ability to quantify in-plane anisotropy - make it potentially useful for characterizing elements of microelectromechanical structures, masks for advanced lithography systems, acoustic filters, and other devices in which the mechanical properties of membranes are important.

Original languageEnglish (US)
Pages (from-to)547-553
Number of pages7
JournalJournal of the Acoustical Society of America
Volume109
Issue number2
DOIs
StatePublished - Feb 21 2001

ASJC Scopus subject areas

  • Arts and Humanities (miscellaneous)
  • Acoustics and Ultrasonics

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