Nonlinear regression fits for simulated cycle time vs. throughput curves for semiconductor manufacturing

Rachel T. Johnson*, Feng Yang, Bruce E. Ankenman, Barry L. Nelson

*Corresponding author for this work

Research output: Contribution to journalConference articlepeer-review

10 Scopus citations

Abstract

This paper illustrates an example of the use of a metamodeling approach to simulation through an example of two real world semiconductor manufacturing systems. The metamodel used was from Yang et al. (2004) and has similarities to Cheng and Kleijnen (1999). The approach aims at reducing the amount of simulation work necessary to generate high quality cycle time-throughput (CT-TH) curves. The paper specifically focuses on demonstrating mat, in practice, CT-TH curves can deviate significantly from forms currently assumed in the literature (Cheng and Kleijnen 1999).

Original languageEnglish (US)
Pages (from-to)1951-1954
Number of pages4
JournalProceedings - Winter Simulation Conference
Volume2
StatePublished - 2004
EventProceedings of the 2004 Winter Simulation Conference - Washington, DC, United States
Duration: Dec 5 2004Dec 8 2004

ASJC Scopus subject areas

  • Software
  • Modeling and Simulation
  • Computer Science Applications

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