Abstract
This paper illustrates an example of the use of a metamodeling approach to simulation through an example of two real world semiconductor manufacturing systems. The metamodel used was from Yang et al. (2004) and has similarities to Cheng and Kleijnen (1999). The approach aims at reducing the amount of simulation work necessary to generate high quality cycle time-throughput (CT-TH) curves. The paper specifically focuses on demonstrating mat, in practice, CT-TH curves can deviate significantly from forms currently assumed in the literature (Cheng and Kleijnen 1999).
Original language | English (US) |
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Pages (from-to) | 1951-1954 |
Number of pages | 4 |
Journal | Proceedings - Winter Simulation Conference |
Volume | 2 |
State | Published - 2004 |
Event | Proceedings of the 2004 Winter Simulation Conference - Washington, DC, United States Duration: Dec 5 2004 → Dec 8 2004 |
ASJC Scopus subject areas
- Software
- Modeling and Simulation
- Computer Science Applications