Nonlinear regression fits for simulated cycle time vs. throughput curves for semiconductor manufacturing

Rachel T. Johnson; Feng Yang; Bruce E. Ankenman; Barry L. Nelson

Nonlinear regression fits for simulated cycle time vs. throughput curves for semiconductor manufacturing

Rachel T. Johnson^*, Feng Yang, Bruce E. Ankenman, Barry L. Nelson

^*Corresponding author for this work

Industrial Engineering and Management Sciences

Research output: Contribution to journal › Conference article › peer-review

7 Scopus citations

Abstract

This paper illustrates an example of the use of a metamodeling approach to simulation through an example of two real world semiconductor manufacturing systems. The metamodel used was from Yang et al. (2004) and has similarities to Cheng and Kleijnen (1999). The approach aims at reducing the amount of simulation work necessary to generate high quality cycle time-throughput (CT-TH) curves. The paper specifically focuses on demonstrating mat, in practice, CT-TH curves can deviate significantly from forms currently assumed in the literature (Cheng and Kleijnen 1999).

Original language	English (US)
Pages (from-to)	1951-1954
Number of pages	4
Journal	Proceedings - Winter Simulation Conference
Volume	2
State	Published - 2004
Event	Proceedings of the 2004 Winter Simulation Conference - Washington, DC, United States Duration: Dec 5 2004 → Dec 8 2004

ASJC Scopus subject areas

Software
Modeling and Simulation
Computer Science Applications

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title = "Nonlinear regression fits for simulated cycle time vs. throughput curves for semiconductor manufacturing",

abstract = "This paper illustrates an example of the use of a metamodeling approach to simulation through an example of two real world semiconductor manufacturing systems. The metamodel used was from Yang et al. (2004) and has similarities to Cheng and Kleijnen (1999). The approach aims at reducing the amount of simulation work necessary to generate high quality cycle time-throughput (CT-TH) curves. The paper specifically focuses on demonstrating mat, in practice, CT-TH curves can deviate significantly from forms currently assumed in the literature (Cheng and Kleijnen 1999).",

author = "Johnson, {Rachel T.} and Feng Yang and Ankenman, {Bruce E.} and Nelson, {Barry L.}",

year = "2004",

language = "English (US)",

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journal = "Proceedings - Winter Simulation Conference",

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T1 - Nonlinear regression fits for simulated cycle time vs. throughput curves for semiconductor manufacturing

AU - Johnson, Rachel T.

AU - Yang, Feng

AU - Ankenman, Bruce E.

AU - Nelson, Barry L.

PY - 2004

Y1 - 2004

N2 - This paper illustrates an example of the use of a metamodeling approach to simulation through an example of two real world semiconductor manufacturing systems. The metamodel used was from Yang et al. (2004) and has similarities to Cheng and Kleijnen (1999). The approach aims at reducing the amount of simulation work necessary to generate high quality cycle time-throughput (CT-TH) curves. The paper specifically focuses on demonstrating mat, in practice, CT-TH curves can deviate significantly from forms currently assumed in the literature (Cheng and Kleijnen 1999).

AB - This paper illustrates an example of the use of a metamodeling approach to simulation through an example of two real world semiconductor manufacturing systems. The metamodel used was from Yang et al. (2004) and has similarities to Cheng and Kleijnen (1999). The approach aims at reducing the amount of simulation work necessary to generate high quality cycle time-throughput (CT-TH) curves. The paper specifically focuses on demonstrating mat, in practice, CT-TH curves can deviate significantly from forms currently assumed in the literature (Cheng and Kleijnen 1999).

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M3 - Conference article

AN - SCOPUS:17744380258

VL - 2

SP - 1951

EP - 1954

JO - Proceedings - Winter Simulation Conference

JF - Proceedings - Winter Simulation Conference

SN - 0891-7736

T2 - Proceedings of the 2004 Winter Simulation Conference

Y2 - 5 December 2004 through 8 December 2004

ER -