Novel integrating solid state detector with segmentation for scanning transmission soft x-ray microscopy

Michael Feser, Chris Jacobsen, Pavel Rehak, Gianluigi Degeronimo, Peter Holl, Lothar Strüder

Research output: Contribution to journalArticlepeer-review

9 Scopus citations

Abstract

An integrating solid state detector with segmentation has been developed that addresses the needs in scanning transmission x-ray microscopy below 1 keV photon energy. The detector is not cooled and can be operated without an entrance window which leads to a total photon detection efficiency close to 100%. The chosen segmentation with 8 independent segments is matched to the geometry of the STXM to maximize image mode flexibility. In the bright field configuration for 1 ms integration time and 520 eV x-rays the rms noise is 8 photons per integration.

Original languageEnglish (US)
Pages (from-to)117-125
Number of pages9
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume4499
DOIs
StatePublished - 2001

Keywords

  • Soft x-ray detectors
  • X-ray microscopy

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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