Obtaining uniform dopant distributions in VLS-grown Si nanowires

Keyphrases

• Dopant Distribution 100%
• Silicon Nanowires (SiNWs) 100%
• Surface Doping 100%
• Doping Profile 66%
• Non-metal Doping 66%
• Order of Magnitude 33%
• Nanowires 33%
• Surface Diffusion 33%
• Vapor-liquid-solid Method 33%
• Active Dopants 33%
• Dopant 33%
• Annealing 33%
• Growth Conditions 33%
• Active Surface 33%
• Doping Concentration 33%
• Thermal Annealing 33%
• Si-doped 33%
• Scanning Kelvin Probe Force Microscopy (SKPFM) 33%
• Vapor-liquid-solid Process 33%
• Semiconducting Nanowires 33%
• Uniform Doping 33%
• Concentration Variation 33%
• Scanning Photocurrent Microscopy 33%
• Nanowire Surfaces 33%
• Growth Axis 33%
• Phosphorus Doping 33%

Engineering

• Dopants 100%
• Si Nanowires 100%
• Nanowire 100%
• Photocurrent 33%
• Growth Condition 33%
• Active Surface 33%
• Solid Process 33%

Material Science

• Nanowires 100%
• Doping (Additives) 100%
• Surface (Surface Science) 80%